JACoW logo

Joint Accelerator Conferences Website

The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.

BiBTeX citation export for MOPVA100: Atomic Layer Deposition of Niobium Nitride from Different Precursors
@InProceedings{Pizzol:IPAC2017-MOPVA100,
  author       = {P. Pizzol and P. Chalker and O.B. Malyshev and J.W. Roberts and R. Valizadeh and J. Wrench},
  title        = {{A}tomic {L}ayer {D}eposition of {N}iobium {N}itride from {D}ifferent {P}recursors},
  booktitle    = {Proc. of International Particle Accelerator Conference (IPAC'17),
                  Copenhagen, Denmark, 14–19 May, 2017},
  pages        = {1094--1097},
  paper        = {MOPVA100},
  language     = {english},
  keywords     = {plasma, niobium, experiment, controls, simulation},
  venue        = {Copenhagen, Denmark},
  series       = {International Particle Accelerator Conference},
  number       = {8},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {May},
  year         = {2017},
  isbn         = {978-3-95450-182-3},
  doi          = {https://doi.org/10.18429/JACoW-IPAC2017-MOPVA100},
  url          = {http://jacow.org/ipac2017/papers/mopva100.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2017-MOPVA100},
}