Author: Wang, X.F.
Paper Title Page
THP2WB02 An Overview of the Progress on SSMB 166
 
  • C.-X. Tang, X.J. Deng, W.-H. Huang, T. Rui
    TUB, Beijing, People's Republic of China
  • A. Chao, D.F. Ratner
    SLAC, Menlo Park, California, USA
  • J. Feikes, J. Li, M. Ries
    HZB, Berlin, Germany
  • C. Feng, B.C. Jiang, X.F. Wang
    SINAP, Shanghai, People's Republic of China
  • E. Granados
    MIT, Cambridge, Massachusetts, USA
  • A. Hoehl
    PTB, Berlin, Germany
 
  Steady State Mi­crobunch­ing (SSMB) is an elec­tron stor- age ring based scheme pro­posed by Rat­ner and Chao to gen­er­ate high av­er­age power co­her­ent ra­di­a­tion and is one of the promis­ing can­di­dates to ad­dress the need of kW level EUV source for lith­o­g­ra­phy. After the idea of SSMB was put for­ward, it has at­tracted much at­ten­tion. Re­cently, with the pro­mote of Chao, in col­lab­o­ra­tion with col­leagues from other in­sti­tutes, a SSMB task force has been es­tab­lished in Ts­inghua Uni­ver­sity. The ex­per­i­men­tal proof of the SSMB prin­ci­ple and a fea­si­ble lat­tice de­sign for EUV SSMB are the two main tasks at this mo­ment. SSMB re­lated physics for the for­ma­tion and main­te­nance of mi­crobunches will be ex­plored in the first op­ti­cal proof-of-prin­ci­ple ex­per­i­ment at the MLS stor­age ring in Berlin. For EUV SSMB lat­tice de­sign, lon­gi­tu­di­nal strong fo­cus­ing and re­versible seed­ing are the two schemes on which the team fo­cuses. The pro- gresses made as well as some chal­lenges from phys­i­cal and tech­no­log­i­cal as­pects for EUV SSMB will be pre­sented in this paper.
on behalf of the SSMB team: C. Tang, Alex Chao, X. Deng, W. Huang, and T. Rui of THU; D. Ratner of SLAC; J. Feikes and M. Ries of Helmholtz-Zentrum Berlin; C. Feng, B. Jiang, and X. Wang of SINAP
 
slides icon Slides THP2WB02 [7.924 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-FLS2018-THP2WB02  
Export • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)