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TY - UNPB AU - Won, J. AU - Valdez, J.A. ED - Schaa, Volker RW TI - In-situ Observation of Phase Transformation During Ion Beam Irradiation J2 - Proc. of ECRIS2016, Busan, Korea, August 28 - September 1, 2016 C1 - Busan, Korea T2 - International Workshop on ECR Ion Sources T3 - 22 LA - english AB - The new method uses reflection high-energy electron diffraction (RHEED) to collect electron diffraction patterns while performing ion irradiation. We use a 50 keV electron beam impinging on a crystalline substrate at grazing incidence. In this presentation, we report on ion irradiations of a single crystal. Irradiations were performed using 100 keV Ar ions at room temperature. Before the single crystal was bombarded with Ar ions, a diffraction pattern with strong diffraction maxima was observed. During the Ar ion irradiation, electron diffraction patterns were collected from the near surface region. The initially strong diffraction patterns gradually faded in intensity until no diffraction spots were visible on the phosphor screen at the fluence of 6~8x1014 ions/cm². To confirm the presence of the ion-induced amorphization in the near surface region, we used grazing incidence X-ray diffraction and electron diffraction in a transmission electron microscope. Both characterization techniques corroborated the RHEED in-situ measurement, showing the existence of an amorphous region produced by the 100 keV Ar ions. PB - JACoW CP - Geneva, Switzerland ER -