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RIS citation export for WEAO05: SMASHI and MeLA ECR Ion Source at NFRI: One for Highly-Charged Ions and the Other for High Current Metal Ions

TY - UNPB
AU - You, H.J.
AU - Choo, W.I.
AU - Jang, S.O.
ED - Schaa, Volker RW
TI - SMASHI and MeLA ECR Ion Source at NFRI: One for Highly-Charged Ions and the Other for High Current Metal Ions
J2 - Proc. of ECRIS2016, Busan, Korea, August 28 - September 1, 2016
C1 - Busan, Korea
T2 - International Workshop on ECR Ion Sources
T3 - 22
LA - english
AB - There are two type of ECR ion sources at NFRI. One is SMASHI(Superconducting Multi-Application Source of Highly-charged Ions), and the other MeLA(Magnet-embedded Lisitano Antenna) ion source. They are developed for highly-charged ions(HCI) and high current metal ions(HCMI) generation, respectively. Firstly, SMASHI is a 18 GHz superconducting ECR ion source, which will be dedicated for future application of HCIs and matter interaction. SMASHI is featuring a liquid helium-free SC magnet having fast-excitation capability(>0.1 A/s) of coils, two frequency heating(18, 18+Δ GHz), remotely-positional variable gap extraction system, and two diagnostic ports for the extraction region. Secondly, MeLA ion source is a scalable high current(>10 mA) metal ion source. the MeLA*, originally developed for a large-area microwave ECR plasma source for semiconductor processing by our group, is able to generate high density uniform ECR plasma by a waveguide directly-coupled and permanent Magnet-embedded Lisitano Antenna. In this presentation we describe design aspects of the sources in detail, and then their performance results are provided.
PB - JACoW
CP - Geneva, Switzerland
ER -