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Recent results in the development of ECRIS have proven the potential of an increase in the operating frequency for the production of high intensity multicharge ion beams. The next ambitious steps are discussed today which involve a further increase in frequency up to 60 GHz and the use of broadband microwave sources. Microwave sources capable of meeting the needs of the next generation of ECRIS are considered here, basing on the many years experience of the IAP in design and fabrication of a customer produced high power millimeter-wave equipment. Different types of vacuum electron tubes such as gyro-backward wave oscillators, gyro-traveling wave tubes and gyro-klystrons operating in the frequency range of 30-60 GHz are discussed and compared in terms of a power, gain, frequency band and the rate of frequency sweeping. The results obtained to this date demonstrate that microwave power of 10-15 kW CW in this frequency range and the frequency band up to 10% can be achieved in these sources. The design of mode filters and DC breakers which are the most crucial components of the microwave power transmission line is considered.
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