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Keyword: implantation
Title
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Page
Design Study of High-Energy, High-Current RF Accelerators for Ion Implantation
acceleration, accelerator, ion, quadrupole
1468
H. Deitinghoff, J. Häuser, H. Klein, P. Leipe, A. Schempp, R. W. Thomae, T. Weis (Institut für Angewandte Physik, Univ. Frankfurt), J. Bannenberg, W. Urbanus, R. Wojke, P. W. van Amersfoort (FOM-Instituut, Kruislaan, Amsterdam, The Netherlands)