SRF2013 - List of Authors (Vollenberg, W.)

Paper	Title	Page
TUP077	Thin Film Coating Optimization for HIE-ISOLDE SRF Cavities: Coating Parameters Study and Film Characterization	623
	A. Sublet, I. Aviles Santillana, S. Calatroni, P. Costa Pinto, N.M. Jecklin, S. Prunet, A. Sapountzis, W. Venturini Delsolaro, W. Vollenberg CERN, Geneva, Switzerland
	Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI. The HIE-ISOLDE project at CERN requires the production of 32 cavities in order to increase the energy of the beam. The Quarter Wave Resonators (QWRs) cavities of complex cylindrical geometry (0.3m diameter and 0.8m height) are made of copper and are coated with a thin superconducting layer of niobium. In the present phase of the project the aim is to obtain a niobium film, using the DC bias diode sputtering technique, providing adequate high quality factor of the cavities and to ensure reproducibility for the future series production. After an overview of the explored coating parameters (hardware and process), the resulting film characteristics, thickness profile along the cavity, structure and morphology (SEM measurements) and Residual Resistivity Ratio (RRR) of the Nb film will be shown. The effect of the sputtering gas process pressure and configuration of the coating setup will be highlighted.

Paper

Title

Page

Thin Film Coating Optimization for HIE-ISOLDE SRF Cavities: Coating Parameters Study and Film Characterization

623

A. Sublet, I. Aviles Santillana, S. Calatroni, P. Costa Pinto, N.M. Jecklin, S. Prunet, A. Sapountzis, W. Venturini Delsolaro, W. Vollenberg
CERN, Geneva, Switzerland

Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI.
The HIE-ISOLDE project at CERN requires the production of 32 cavities in order to increase the energy of the beam. The Quarter Wave Resonators (QWRs) cavities of complex cylindrical geometry (0.3m diameter and 0.8m height) are made of copper and are coated with a thin superconducting layer of niobium. In the present phase of the project the aim is to obtain a niobium film, using the DC bias diode sputtering technique, providing adequate high quality factor of the cavities and to ensure reproducibility for the future series production. After an overview of the explored coating parameters (hardware and process), the resulting film characteristics, thickness profile along the cavity, structure and morphology (SEM measurements) and Residual Resistivity Ratio (RRR) of the Nb film will be shown. The effect of the sputtering gas process pressure and configuration of the coating setup will be highlighted.