SRF2013 - List of Authors (Prunet, S.)

Paper	Title	Page
TUP076	Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering	620
	A. Sublet, I. Aviles Santillana, S. Calatroni, A. D'Elia, N.M. Jecklin, I. Mondino, S. Prunet, M. Therasse, W. Venturini Delsolaro, P. Zhang CERN, Geneva, Switzerland
	Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI. In the context of the HIE-ISOLDE upgrade at CERN, several new facilities for the niobium sputter coating of QWR-type superconducting RF accelerating cavities have been developed, built, and successfully operated. In order to further optimize the production process of these cavities the magnetron sputtering technique has been further investigated and continued as an alternative to the already successfully operational DC bias diode sputtering method. The purpose of this poster is to present the results obtained with this technique. The Nb thickness profile along the cavity and its correlation with the electro-magnetic field distribution inside the cavity are discussed. Film structure, morphology and Residual Resistivity Ratio (RRR) will be considered as well and compared with films obtained by DC bias diode sputtering. Finally these results will be compared with RF characterization and measurement of a production-like magnetron-coated cavity.

TUP077	Thin Film Coating Optimization for HIE-ISOLDE SRF Cavities: Coating Parameters Study and Film Characterization	623
	A. Sublet, I. Aviles Santillana, S. Calatroni, P. Costa Pinto, N.M. Jecklin, S. Prunet, A. Sapountzis, W. Venturini Delsolaro, W. Vollenberg CERN, Geneva, Switzerland
	Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI. The HIE-ISOLDE project at CERN requires the production of 32 cavities in order to increase the energy of the beam. The Quarter Wave Resonators (QWRs) cavities of complex cylindrical geometry (0.3m diameter and 0.8m height) are made of copper and are coated with a thin superconducting layer of niobium. In the present phase of the project the aim is to obtain a niobium film, using the DC bias diode sputtering technique, providing adequate high quality factor of the cavities and to ensure reproducibility for the future series production. After an overview of the explored coating parameters (hardware and process), the resulting film characteristics, thickness profile along the cavity, structure and morphology (SEM measurements) and Residual Resistivity Ratio (RRR) of the Nb film will be shown. The effect of the sputtering gas process pressure and configuration of the coating setup will be highlighted.

Paper

Title

Page

Preliminary Results of Nb Thin Film Coating for HIE-ISOLDE SRF Cavities Obtained by Magnetron Sputtering

620

A. Sublet, I. Aviles Santillana, S. Calatroni, A. D'Elia, N.M. Jecklin, I. Mondino, S. Prunet, M. Therasse, W. Venturini Delsolaro, P. Zhang
CERN, Geneva, Switzerland

Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI.
In the context of the HIE-ISOLDE upgrade at CERN, several new facilities for the niobium sputter coating of QWR-type superconducting RF accelerating cavities have been developed, built, and successfully operated. In order to further optimize the production process of these cavities the magnetron sputtering technique has been further investigated and continued as an alternative to the already successfully operational DC bias diode sputtering method. The purpose of this poster is to present the results obtained with this technique. The Nb thickness profile along the cavity and its correlation with the electro-magnetic field distribution inside the cavity are discussed. Film structure, morphology and Residual Resistivity Ratio (RRR) will be considered as well and compared with films obtained by DC bias diode sputtering. Finally these results will be compared with RF characterization and measurement of a production-like magnetron-coated cavity.

TUP077

Thin Film Coating Optimization for HIE-ISOLDE SRF Cavities: Coating Parameters Study and Film Characterization

623

A. Sublet, I. Aviles Santillana, S. Calatroni, P. Costa Pinto, N.M. Jecklin, S. Prunet, A. Sapountzis, W. Venturini Delsolaro, W. Vollenberg
CERN, Geneva, Switzerland

Funding: Work supported in part by a Marie Curie Early Initial Training Network Fellowship of the European Community's 7th Programme under contract number PITN-GA-2010-264330-CATHI.
The HIE-ISOLDE project at CERN requires the production of 32 cavities in order to increase the energy of the beam. The Quarter Wave Resonators (QWRs) cavities of complex cylindrical geometry (0.3m diameter and 0.8m height) are made of copper and are coated with a thin superconducting layer of niobium. In the present phase of the project the aim is to obtain a niobium film, using the DC bias diode sputtering technique, providing adequate high quality factor of the cavities and to ensure reproducibility for the future series production. After an overview of the explored coating parameters (hardware and process), the resulting film characteristics, thickness profile along the cavity, structure and morphology (SEM measurements) and Residual Resistivity Ratio (RRR) of the Nb film will be shown. The effect of the sputtering gas process pressure and configuration of the coating setup will be highlighted.