Author: Klug, J.
Paper Title Page
WEIOC03
 Atomic Layer Deposition of Thin Superconducting Films and Multilayers: Coupons and Cavity Tests  
 
  • Th. Proslier, N. Groll, J. Klug, M.J. Pellin
    ANL, Argonne, USA
  • G. Ciovati, P. Kneisel, A-M. Valente-Feliciano
    JLAB, Newport News, Virginia, USA
  • A. Grassellino, A. Romanenko
    Fermilab, Batavia, USA
  • J. Zasadzinski
    IIT, Chicago, Illinois, USA
  
  Funding: DOE-office of Science, High Energy Physics.
I will present a summary of the work done over the last 2 years that encompasses both coupons study of thin superconducting films and multilayers and preliminary superconducting RF cavity tests coated by ALD. I will also present results of Nb onto Copper. 		 
slides icon Slides WEIOC03 [25.554 MB]