| Paper | Title | Page |
|---|---|---|
THP075 |
Hexapod Systems for Ultra-High Vacuum Applications with Active Vibration Damping | |
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| Hexapods are widely used for positioning objects in six dimensions of freedom with high precision down to the submicron range. For applications in ultra-high-vacuum atmosphere, a Hexapod was designed that uses a driving principle with motors outside of the vacuum atmosphere. In this new design, an active vibration damping system based on piezoelectric actuators in combination with a newly developed 6-D acceleration sensor was implemented. | ||
THP076 |
Reliability of Multilayer Piezoelectric Actuators in Precise Positioning Applications | |
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| The piezoelectric multilayer actuator technology is an essential tool in ultra-precise nano-positioning. For the further spreading into new applications it is very important to exactly know and specify the operating limits of these actuators. This work presents a DC-signal-lifetime calculation tool for PICMA® co-fired multilayer actuators as a result of an extensive study at different temperature and humidity conditions. Furthermore, AC-results for several driving signals, pre-stress, and temperature conditions are shown. | ||