• Y. Wang, L. Fan, L. Liu, J. P. Wang, W. Wei, B. Zhang
  USTC/NSRL, Hefei, Anhui
• Y.F. Zhang
  IHEP Beijing, Beijing

TiN coating has been widely applied in surface treatments of particle accelerator vacuum chambers because of its characteristics such as good electrical conductivity, stability of performance, ability to block hydrogen permeation, low SEY, etc. With DC sputtering, TiN film has been coated on the inner face of a stainless steel pipe vacuum chamber, 86 mm in diameter and 2300 mm in length. The vacuum performances testing of the coated chamber has also been done, including thermal outgassing rate measurement, PSD measurement, and SEY measurement of samples. Compared with those of uncoated stainless steel chamber, the results show that coating TiN film is a very effective method of the treatment of particle accelerator vacuum chamber.

• Y. Wang, L. Fan, W. Li, J. P. Wang, W. Wei, B. Zhang
  USTC/NSRL, Hefei, Anhui
• Y.F. Zhang
  IHEP Beijing, Beijing

Titanium-Zirconium-Vanadium (TiZrV) nonevaporable getter (NEG), which can be fully activated after 4 hours heating at 200°;C, has been applied in many accelerators owing to the outstanding vacuum performance. In our experiments, TiZrV films have been deposited onto the inner face of stainless steel pipes via DC sputtering using argon gas as the sputtering gas. Samples have been investigated by Scanning Electron Microscopy (SEM), Energy Dispersive X-ray spectroscopy (EDX) and X-ray Photoelectron Spectroscopy (XPS) to determine film composition and thickness, and by X-ray diffraction (XRD) to determine film structure and morphology. Second Electron Yields (SEY) of the TiZrV film have also been measured.