PAC09 - List of Authors (Ha, Y.)

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Ha, Y.

Paper	Title	Page
TU5PFP002	Atomic Layer Deposition for SRF Cavities	803
	J. Norem, J.W. Elam, M.J. Pellin ANL, Argonne C.Z. Antoine CEA, Gif-sur-Yvette G. Ciovati, P. Kneisel, C.E. Reece, R.A. Rimmer JLAB, Newport News, Virginia L. Cooley Fermilab, Batavia A.V. Gurevich NHMFL, Tallahassee, Florida Y. Ha, Th. Proslier, J. Zasadzinski IIT, Chicago, Illinois
	Funding: DOE/OHEP We have begun using Atomic Layer Deposition (ALD) to synthesize a variety of surface coatings on coupons and cavities as part of an effort to produce rf structures with significantly better performance and yield than those obtained from bulk niobium, The ALD process offers the possibility of conformally coating complex cavity shapes with precise layered structures with tightly constrained morphology and chemical properties. Our program looks both at the metallurgy and superconducting properties of these coatings, and also their performance in working structures. Initial results include: 1) evidence from point contact tunneling showing magnetic oxides can be a significant limitation to high gradient operation, 2) experimental results showing the production sharp niobium/oxide interfaces from a high temperature bake of ALD coated Al2O3 on niobium surfaces, 3) results from ALD coated structures.

Paper

Title

Page

TU5PFP002

Atomic Layer Deposition for SRF Cavities

803

J. Norem, J.W. Elam, M.J. Pellin
ANL, Argonne
C.Z. Antoine
CEA, Gif-sur-Yvette
G. Ciovati, P. Kneisel, C.E. Reece, R.A. Rimmer
JLAB, Newport News, Virginia
L. Cooley
Fermilab, Batavia
A.V. Gurevich
NHMFL, Tallahassee, Florida
Y. Ha, Th. Proslier, J. Zasadzinski
IIT, Chicago, Illinois

Funding: DOE/OHEP

We have begun using Atomic Layer Deposition (ALD) to synthesize a variety of surface coatings on coupons and cavities as part of an effort to produce rf structures with significantly better performance and yield than those obtained from bulk niobium, The ALD process offers the possibility of conformally coating complex cavity shapes with precise layered structures with tightly constrained morphology and chemical properties. Our program looks both at the metallurgy and superconducting properties of these coatings, and also their performance in working structures. Initial results include: 1) evidence from point contact tunneling showing magnetic oxides can be a significant limitation to high gradient operation, 2) experimental results showing the production sharp niobium/oxide interfaces from a high temperature bake of ALD coated Al2O3 on niobium surfaces, 3) results from ALD coated structures.