Experiment and Results on Plasma Etching of SRF Cavities

Upadhyay, Janardan; Im, Do; Peshl, Jeremy; Phillips, Larry; Popović, Svetozar; Valente-Feliciano, Anne-Marie; Vušković, Leposova

doi:10.18429/JACoW-IPAC2015-WEPWI040

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BiBTeX citation export for WEPWI040: Experiment and Results on Plasma Etching of SRF Cavities

@InProceedings{Upadhyay:IPAC2015-WEPWI040,
  author       = {J. Upadhyay and others},
  title        = {{E}xperiment and {R}esults on {P}lasma {E}tching of {SRF} {C}avities},
  booktitle    = {Proc. 6th International Particle Accelerator Conference (IPAC'15),
                  Richmond, VA, USA, May 3-8, 2015},
  pages        = {3581--3583},
  paper        = {WEPWI040},
  language     = {english},
  keywords     = {cavity, plasma, SRF, niobium, ion},
  venue        = {Richmond, VA, USA},
  series       = {International Particle Accelerator Conference},
  number       = {6},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {June},
  year         = {2015},
  isbn         = {978-3-95450-168-7},
  doi          = {https://doi.org/10.18429/JACoW-IPAC2015-WEPWI040},
  url          = {http://jacow.org/ipac2015/papers/wepwi040.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2015-WEPWI040},
}