The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
@unpublished{Naulleau:IPAC2015-MOYGB1,
author = {P. Naulleau},
title = {{I}ndustrial {A}pplications of {F}ree {E}lectron {L}asers: {E}xtreme {U}ltraviolet {L}ithography},
booktitle = {Proc. of International Particle Accelerator Conference (IPAC'15),
Richmond, VA, USA, May 3-8, 2015},
language = {english},
intype = {presented at the},
series = {International Particle Accelerator Conference},
number = {6},
venue = {Richmond, VA, USA},
publisher = {JACoW},
address = {Geneva, Switzerland},
month = {June},
year = {2015},
note = {presented at IPAC2015 in Richmond, VA, USA, unpublished},
}