The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Wang, J. AU - Fan, L. AU - Hong, Y.Z. AU - Liu, W.L. AU - Pei, X.T. AU - Tang, K. AU - Wang, Y. AU - Wei, W. AU - Xu, Y.H. AU - Zhang, B. ED - Petit-Jean-Genaz, Christine ED - Arduini, Gianluigi ED - Michel, Peter ED - Schaa, Volker RW TI - Simulation of the Trajectory of Electrons in a Magnetron Sputtering System of TiN with CST Particle Studio J2 - Proc. of IPAC2014, Dresden, Germany, June 15-20, 2014 C1 - Dresden, Germany T2 - International Particle Accelerator Conference T3 - 5 LA - english AB - In the process of magnetron sputtering deposition, electromagnetic fields have an important influence on the trajectory of particle movement and the properties of the TiN thin film in many cases. Even for simple geometries, the analytical prediction for charged particles trajectories is extremely cumbersome, so numerical simulations are essential to obtain a better understanding of the possible effects and helpful to optimize the design of experimental facility and experimental process. A software of CST PARTICLE STUDIOTM has been used to simulate the effect of magnetic and electric fields on electrons trajectories in the process of film coating. According to the simulation results, the improvement measures of the system design and experimental process have been achieved. The author put forward the improvement measures on film coating process according to the simulation results. The result shows that it is feasible and convenient to use three dimensional tool in the simulation of trajectory of electrons in a magnetron sputtering system. PB - JACoW CP - Geneva, Switzerland SP - 2341 EP - 2343 KW - vacuum KW - cathode KW - electron KW - simulation KW - experiment DA - 2014/07 PY - 2014 SN - 978-3-95450-132-8 DO - 10.18429/JACoW-IPAC2014-WEPME036 UR - http://jacow.org/ipac2014/papers/wepme036.pdf ER -