IPAC2011 - List of Authors (Hattori, T.)

Paper	Title	Page
THPS036	Development of Thin NCS-foils by N+ Ion Beam Sputtering and Their Characteristics	3499
	I. Sugai, H. Kawakami, M. Oyaizu, Y. Takeda KEK, Ibaraki, Japan T. Hattori, K.K. Kawasaki RLNR, Tokyo, Japan
	We have developed thin Nitride Carbon Stripper foils (NCS-foil) with a higher nitrogen content by ion beam sputtering　method with reactive nitrogen gas. Such NCS-foils have been demonstrated that the foils in range of 10^-25 ug/m2 have shown long-lifetime as stripper foil against high intensity heavy ion beam bombardment. From the results, we found that the nitrogen element in the carbon foils plays very important role of the foil lifetime. Therefore, in order to investigate further influence of the lifetime on the nitrogen amount in the NCS-foils, we measured the sputtering yield at the different sputtering angles and carbon source materials. We also measured the ratio of nitrogen in carbon foil made at the different sputtering angles, target materials and the sputtering voltages of 4-15 kV by means of RBS method. The foil-lifetime made in above different conditions was measured with a 3.2 MeV Ne⁺ ion beam. The lifetime does not essentially depend on the sputtering angles and the target materials, and the maximum and average lifetimes showed 240 and 40 times longer than that of the CM-best foils.

Paper

Title

Page

Development of Thin NCS-foils by N+ Ion Beam Sputtering and Their Characteristics

3499

I. Sugai, H. Kawakami, M. Oyaizu, Y. Takeda
KEK, Ibaraki, Japan
T. Hattori, K.K. Kawasaki
RLNR, Tokyo, Japan

We have developed thin Nitride Carbon Stripper foils (NCS-foil) with a higher nitrogen content by ion beam sputtering　method with reactive nitrogen gas. Such NCS-foils have been demonstrated that the foils in range of 10^-25 ug/m2 have shown long-lifetime as stripper foil against high intensity heavy ion beam bombardment. From the results, we found that the nitrogen element in the carbon foils plays very important role of the foil lifetime. Therefore, in order to investigate further influence of the lifetime on the nitrogen amount in the NCS-foils, we measured the sputtering yield at the different sputtering angles and carbon source materials. We also measured the ratio of nitrogen in carbon foil made at the different sputtering angles, target materials and the sputtering voltages of 4-15 kV by means of RBS method. The foil-lifetime made in above different conditions was measured with a 3.2 MeV Ne⁺ ion beam. The lifetime does not essentially depend on the sputtering angles and the target materials, and the maximum and average lifetimes showed 240 and 40 times longer than that of the CM-best foils.