Author: Beringer, D.
Paper Title Page
MOPC116 Development of Nb and Alternative Material Thin Films Tailored for SRF Applications 349
 
  • A-M. Valente-Feliciano, H.L. Phillips, C.E. Reece, J.K. Spradlin, B. Xiao, X. Zhao
    JLAB, Newport News, Virginia, USA
  • H. Baumgart, D. Gu
    ODU, Norfolk, Virginia, USA
  • D. Beringer, R.A. Lukaszew
    The College of William and Mary, Williamsburg, USA
  • K.I. Seo
    NSU, Newport News, Virginia, USA
  
  Funding: Authored by Jefferson Science Associates, LLC under U.S.DOE Contract No. DE-AC05-06OR23177.
Over the years, Nb/Cu tech­nol­o­gy, de­spite its short­com­ings due to the com­mon­ly used mag­netron sput­ter­ing, has po­si­tioned it­self as an al­ter­na­tive route for the fu­ture of su­per­con­duct­ing struc­tures used in ac­cel­er­a­tors. Re­cent­ly, sig­nif­i­cant progress has been made in the de­vel­op­ment of en­er­get­ic vac­u­um de­po­si­tion tech­niques, show­ing promise for the pro­duc­tion of thin films tai­lored for SRF ap­pli­ca­tions. JLab is pur­su­ing en­er­get­ic con­den­sa­tion de­po­si­tion via tech­niques such as Elec­tron Cy­clotron Res­o­nance and High Power Im­pulse Mag­netron Sput­ter­ing. As part of this pro­ject, the in­flu­ence of the de­po­si­tion en­er­gy on the ma­te­ri­al and RF prop­er­ties of the Nb thin film is in­ves­ti­gat­ed with the char­ac­ter­i­za­tion of their sur­face, struc­ture, su­per­con­duct­ing prop­er­ties and RF re­sponse. It has been shown that the film RRR can be tuned from sin­gle dig­its to val­ues greater than 400. This paper pre­sents re­sults on sur­face impedance mea­sure­ments cor­re­lat­ed with sur­face and ma­te­ri­al char­ac­ter­i­za­tion for Nb films pro­duced on var­i­ous sub­strates, monocrys­talline and poly­crys­talline as well as amor­phous. A progress re­port on work on NbTiN and AlN based mul­ti­lay­er struc­tures will also be pre­sent­ed.