| Paper | Title | Page |
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| WEPEC077 | RF and Structural Characterization of SRF Thin Films | 3055 |
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In the past years, energetic vacuum deposition methods have been developed in different laboratories to improve Nb/Cu technology for superconducting cavities. Jefferson Lab and collaborators are pursuing energetic condensation deposition via Electron Cyclotron Resonance. As part of this study, the influence of the deposition energy, the coating temperature and the substrate's nature on the material and RF properties of the Nb thin film is investigated. The film surface and structure analyzes are conducted with various techniques like X-ray diffraction, Transmission Electron Microscopy, Auger Electron Spectroscopy and RHEED. The microwave properties of the films are characterized on 50 mm disk samples with a 7.5 GHz surface impedance characterization system. This paper presents surface impedance measurements in correlation with surface and material characterization for Nb films produced on various substrates with different bias voltages. Emerging opportunities for developing multi-layer superconducting rf films are also highlighted with the commissioning results of a new deposition system. |