• Y. Kato, T. Iida, F. Sato
  Osaka Univ., Suita

An electron cyclotron resonance ion source (ECRIS) has been developing long time and their performance is still extending at present. Recently, they are not only used in producing multi-charged ions, but also molecules and cluster ions. A new type of ion source with a wide operation window is expected for various uses. We developed a novel magnetic field configuration ECRIS. The magnetic field configuration is constructed by a pair of comb-shaped magnetic field by all permanent magnets and has opposite polarity each other with ring-magnets. This magnetic configuration suppresses the loss due to E×B drift, and then plasma confinement is enhanced. We conduct preliminary extracting and forming large bore ion beam from this source. We will make this source a part of tandem type ion source for the first stage. Broad ion beams extracted from the first stage and transfer like a shower to plasma generated by the second stage. We hope to realize a device which has a very wide range operation window in a single device to produce many kinds of ion beams. We try to control plasma parameters by multiply frequency microwaves for broad ion beam extraction. It is found that plasma and beam can be controllable on spatial profiles beyond wide operation window of plasma parameters. We investigated feasibility of the device which has wide range operation window in a single device to produce many kinds of ion beams as like universal source based on ECRIS.