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Weise, H.

Paper Title Page
MOPC54 Potential of FLASH FEL Technology for Construction of a kW-scale Light Source for the Next Generation Lithography 142
 
  • E. Saldin, E. Schneidmiller, V. Vogel, H. Weise, M.V. Yurkov
    DESY, Hamburg
  • E. Syresin
    JINR, Dubna, Moscow Region
 
 

The driving engine of the Free Electron Laser in Hamburg (FLASH) is an L-band superconducting accelerator. It is designed to operate in a pulsed mode with 800 μs pulse duration and repetition rate of 10 Hz. Maximum accelerated current over macropulse is about 10 mA, and with the energy of electrons of 1 GeV average output power is about 72 kW. Expected power of the FEL radiation generated by FLASH is about 40 W. We show that FLASH technology holds great potential for increasing average power of the linear accelerator and increase of the transformation efficiency of the electron kinetic energy to the light. Thus, it will be possible to construct FLASH-like free electron laser operating at the wavelength of 13.5 nanometer with an average power in a kilowatt range. Such a source meets the requirements to the light source for the next generation lithography (NGL).