• N.M. Kelez, Y.D. Chuang, R.M. Duarte, D.E. Lee, W.R. McKinney, V.V. Yashchuk, S.S. Yuan
  LBNL, Berkeley, California
• J.D. Bozek
  SLAC, Menlo Park, California

There is an increasing demand for highly de-magnified and well-focused beams with high quality imaging of the full field to further explore the potential of novel instruments. For beamlines operating at a focal point, mechanical benders have often been used to shape the refocusing mirror into an ideal elliptical cylinder. However, the limited number of couplings for these mechanisms requires specific substrate side-shaping, often calculated using beam bending theory, to meet demanding figure requirements. Here, we use finite element analysis (FEA) to both validate the side-shaping algorithm and then couple the output with SHADOW and a bender couple optimization algorithm to evaluate the resulting mirror figure and ultimately improve the mechanical design. Finally, the metrology results of the Long Trace Profiler (LTP) are used to both set the final shape of the completed assembly and validate the model and analysis methods.