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TY - CONF AU - Xiao, L. AU - Lu, X.Y. AU - Tan, W.W. AU - Xie, D. AU - Yang, Y. AU - Zhu, L. ED - Michel, Peter ED - Arnold, André ED - Schaa, Volker RW TI - The Technical Study of Nb₃Sn Film Deposition on Copper by HiPIMS J2 - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019 CY - Dresden, Germany T2 - International Conference on RF Superconductivity T3 - 19 LA - english AB - Our work is mainly focused on the deposition methods of Nb₃Sn films on Cu substrates and film‘s properties. The superconducting transition temperature(Tc) of Nb₃Sn film is 12K. There are diffraction peaks of Nb₃Sn in the X-ray diffraction patterns in which without diffraction peaks of copper compounds. Scanning electron micro-structures of Nb₃Sn film reflect its nice compactness and binding force between film and substrate. PB - JACoW Publishing CP - Geneva, Switzerland SP - 846 EP - 847 KW - SRF KW - niobium KW - cavity KW - electron KW - superconductivity DA - 2019/08 PY - 2019 SN - "" SN - 978-3-95450-211-0 DO - doi:10.18429/JACoW-SRF2019-THP008 UR - http://jacow.org/srf2019/papers/thp008.pdf ER -