| Paper | Title | Page |
|---|---|---|
| TUPKF074 | Niobium Thin Film Cavity Deposition by ECR Plasma | 1108 |
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| Nb/Cu technology for superconducting cavities has proven to be over the years a viable alternative to bulk niobium. Energetic vacuum deposition is a very unique alternative method to grow niobium thin film on copper. Single crystal growth of niobium on sapphire substrate has been achieved as well as good surface morphology of niobium on small copper samples. The design of a cavity deposition system is in development. This paper presents the exploratory studies of the influence of the deposition energy on the Nb thin film properties. Several possible venues to achieve Nb/Cu cavity deposition with this technique are also discussed along with the design of the cavity deposition setup under development. |